A micro-Pirani gauge vacuum gauge using a low thermal conductivity support element is described. The micro-Pirani meter or vacuum sensor is configured to heat a gas and to actuate to generate a signal corresponding to the pressure of the gas, and a platform configured to receive the heating element and having a first thermal conductivity And a support element configured to support the platform together with the heating element in an opening disposed in the substrate and connected to the substrate, wherein the support element is lower than the first thermal conductivity. A support element having a thermal conductivity of two. Multi-mode pressure sensing with a micro-Pirani meter is also described.
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