Tunable interference filter, method for manufacturing variable wavelength interference filter, optical device and optical component

摘要

A wavelength tunable interference filter, an optical apparatus, and an optical component include a first substrate, which includes a first optical film and a first driving electrode, and a second substrate, which includes a support portion that supports the first substrate, a second optical film, and a second driving electrode. The second substrate includes an external connection electrode extending to an outer side of the support portion, and includes an electrode forming surface on which the external connection electrode is disposed. A plurality of protruding portions protruding from the electrode forming surface are formed so as to be arrayed in a direction crossing the extending direction of the external connection electrode.