Variable wavelength interference filter, an optical filter device, an optical module, an electronic device, and a driving method of the wavelength tunable interference filter

摘要

PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter capable of performing gap control of a gap between reflection films with high accuracy and that can be reduced in size, an optical filter device, an optical module, an electronic apparatus, and a driving method of a wavelength variable interference filter.;SOLUTION: A wavelength variable interference filter 5 includes a stationary substrate 51, a movable substrate 52, a conductive stationary reflection film 541 provided on the stationary substrate 51, a conductive movable reflection film 542 provided on the movable substrate 52, a first electrode 551 provided on the stationary substrate 51, and a second electrode 552 provided on the movable substrate 52. The stationary reflection film 541 and the movable reflection film 542 form a first electrostatic actuator 54, and the first electrode 551 and the second electrode 552 form a second electrostatic actuator 55.;COPYRIGHT: (C)2014,JPO&INPIT