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Apparatus and method for aligning two plates in transmission small angle X-ray scattering measurement
Apparatus and method for aligning two plates in transmission small angle X-ray scattering measurement
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机译:在透射小角X射线散射测量中对准两块板的装置和方法
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摘要
The disclosure provides an apparatus for aligning first and second plates that are parallel to each other and have the same orientation. The apparatus includes a detector that detects composite small-angle X-ray scattering emitted from patterns of the first and second plates that are perpendicularly impinged by X-ray, and a moving unit that aligns the first and second plates according to a composite amplitude distribution of the composite small-angle X-ray scattering. Therefore, the first and second plates are aligned to each other accurately.
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