PROBLEM TO BE SOLVED: To enable the area where an electrostatic discharge source is present to be accurately identified even including a range of sampling errors.SOLUTION: By an electrostatic discharge source detecting method by which electromagnetic waves generated in connection with electrostatic discharge are detected by a group of reception antennas consisting of multiple reception antennas installed in different locations and three-dimensional coordinates of an electrostatic discharge source are figured out by a hyperbolic curve method from the relation between the time differences of arrivals of the electromagnetic waves at the reception antennas and the installed positions of the reception antennas, a first hyperbola obtained by addition of the values of sampling time intervals and a second hyperbola obtained by subtraction of the values of sampling time intervals relative to a hyperbola for identifying electrostatic discharge source are figured out, and an area formed by crossing of the first hyperbola, the crossing of the second hyperbola, and the crossing of the combination of the first hyperbola and the second hyperbola is identified as an inferred electrostatic discharge source area, which is an area where an accurate electrostatic discharge source including sampling error areas is present.SELECTED DRAWING: Figure 1
展开▼
