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Process for producing pure trimer and / or tetramer silicon compound or germanium compound
Process for producing pure trimer and / or tetramer silicon compound or germanium compound
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机译:制备纯三聚体和/或四聚硅化合物或锗化合物的方法
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摘要
The subject of the present invention is a process for the production of trimer and / or tetramer silicon compounds, or trimer and / or tetramer germanium compounds, wherein a mixture or The mixture from the germanium compound is exposed to a cold plasma and the resulting phase is vacuum rectified and filtered at least once.
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