Ni-base alloy excellent in hot forgeability, high-temperature oxidation resistance and high-temperature halogen gas corrosion resistance, and member using this Ni-base alloy

摘要

There is provided a Ni-based alloy excellent in hot forgeability, high-temperature oxidation resistance, and high-temperature halogen gas corrosion resistance that is suitable as constituent materials, such as a baking tray for chip capacitor, a baking tray for lithium battery cathode material, a CVD apparatus member, a PVD apparatus member, an LCD apparatus member, and a semiconductor manufacturing apparatus member. The Ni-based alloy contains, by weight, 2.0 to 5.0% Al, 0.1 to 2.5% Si, 0.1 to 1.5% Mn, 0.001 to 0.01% B, 0.001 to 0.1% of Zr, and the balance ofNi with inevitable impurities and excels in hot forgeability, high-temperature oxidation resistance, and high-temperature halogen gas corrosion resistance. The Ni-based alloy may further contain 0.8 to 4.0% Cr.