COATING FILM UNEVENNESS MEASUREMENT METHOD AND COATING FILM UNEVENNESS MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an image measurement method capable of performing the inspection of coating unevenness generated due to delicate drying conditions perceivable at last by human eyes which has been difficult in the past and an image measurement device.;SOLUTION: A coating film inspection device includes: a transparent substrate 4 having a periodic electrode pattern 3 formed on the surface; an electric power supply 13 for applying a voltage to the electrode pattern; a light source 1 for irradiating light on a coating film 5 coated on the transparent substrate; and an image detector 12 provided with a collimate lens 2 using light from the light source as substantially parallel light and detecting an image of diffraction light generated from the coating film by light irradiation. The coating film is coated on the transparent substrate 4 formed with the periodic electrode pattern on the surface, and the voltage is applied to the electrode pattern 3, and zeroth order diffraction light close to the diffraction angle in which light intensity of a first side lobe becomes zero is detected from among the diffraction light generated when light is irradiated on the coating film 5.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2017,JPO&INPIT