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Periodic grating, the method of manufacturing the periodic grating, the measuring device
Periodic grating, the method of manufacturing the periodic grating, the measuring device
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机译:周期光栅,周期光栅的制造方法,测量装置
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摘要
PROBLEM TO BE SOLVED: To provide a valid periodic lattice in terms of simplicity in the manufacturing of the periodic lattice.SOLUTION: A periodic lattice 1 contains: first materials; second materials and third materials whose transmittance or reflectance are different from each other. The periodic lattice 1 includes: a first layer 3 constituted of the first materials; and a second layer 4 laminated on the first layer 3, and constituted of second materials. A first lattice part 4a packed with third materials and a second lattice part 4b forming a space with the surface of the first layer 3 as a bottom face are formed in the second layer 4, and the second lattice part 4b is configured such that any portion other than the surface of the second layer 4 is opened to the outside of the periodic lattice 1.
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