Arm-type coordinate measuring machine and deflection correction method for arm-type coordinate measuring machine

摘要

An arm type three-dimensional measuring apparatus includes: a multi-jointed arm mechanism including a probe in a distal end; a processing part for computing a position of the probe, the probe being manually moved; a sensor which is formed in each axis of the multi-jointed arm mechanism and detects at least a force in one predetermined direction and torques in two predetermined axial directions generated in an attitude state of the multi-jointed arm mechanism, wherein the processing part computes a deflection amount in each axis of the multi-jointed arm mechanism based on an output of the sensor and sequentially computes a position of the probe based on the deflection amount.