Processing apparatus of the ceramic material, the processing method of evaluating ceramics material

摘要

PROBLEM TO BE SOLVED: To prevent troubles caused by failure found in the last stage, by evaluating the formation of a split groove.;SOLUTION: A processing device for ceramic materials comprises: a laser device irradiating a laser beam which processes a ceramic material; a drive unit which moves a relative position between the ceramic material and the laser beam; a laser processing beam detector which detects a laser processing beam of the ceramic material; a laser processing beam diameter measuring part which measures a diameter of the laser processing beam detected by the laser processing beam detector.;COPYRIGHT: (C)2014,JPO&INPIT