Additive for electrolytic copper plating bath, electrolytic copper plating bath containing the additive and electrolytic copper plating method using the electrolytic copper plating bath

摘要

Conventionally, when copper is embedded in a trench of a substrate to be plated having fine trenches or holes (hereinafter may be abbreviated as trenches) by electrolytic copper plating, generation of voids and precipitation of copper other than trenches are problematic It was getting. In order to solve the above-mentioned problems, the present invention provides a method for producing a thermoplastic elastomer composition comprising at least one polymer selected from the group consisting of the following general formula (1) and the following general formula (2) An additive for an electrolytic copper plating bath comprising a polymer compound having a molecular weight is provided. (In the formula, X represents at least one unit selected from units represented by a specific structure, and the ratio of a and b is within the range of a: b = 10: 90 to 99: 1.)