Processing Substrate with Crystal Orientation Mark, Method for Detecting Crystal Orientation and Reading Apparatus for Crystal Orientation Mark

摘要

To provide a crystal orientation mark which can be formed easily and inexpensively even with a small calibrated substrate, can perform highly accurate alignment and can include information other than crystal orientation.A crystal orientation mark is drawn on a surface of a processed substrate. The crystal orientation mark includes a marking region for crystal orientation detection and a marking region for information. The marking region for crystal orientation detection is provided at two locations on the outer edge portion of the processed substrate and used for alignment of the processed substrate. The information marking region is provided on a linear region connecting two marking regions for crystal orientation detection and includes a pattern for specifying predetermined information related to the processed substrate.