Transparent electroconductive laminate, method for producing transparent electroconductive laminate, and electronic device using a transparent electroconductive laminate

摘要

A transparent electroconductive laminate having excellent wet heat characteristics, a method for producing a transparent electroconductive laminate, and an electronic device using such a transparent electroconductive laminate. A transparent electroconductive laminate comprising a zinc oxide film formed on at least one side of a substrate by a sputtering method or the like, wherein the zinc oxide film contains zinc oxide and is formed by doping gallium and indium Zinc film, and the zinc oxide film has a plurality of regions having nonuniform concentration distribution with respect to zinc amount, gallium amount, oxygen amount, and indium amount measured by XPS analysis in the film thickness direction, that is, [In] / [Ga] in the first area and the second area are different from each other.