FGM film and manufacturing method thereof

摘要

PROBLEM TO BE SOLVED: To provide a gradient function film of which the electric characteristics vary in a film thickness direction, and to provide a manufacturing method thereof, by a simple and inexpensive technique.;SOLUTION: A raw material solution is prepared with zirconium inorganic salt as a solute, with alcohol as a solvent and with a ketones chemical compound as a first assistant. When preparing the raw material solution, a concentration of the first assistant is adjusted. In the course of repeating the process of supplying mist of the raw material solution to a substrate, evaporating the solvent under control of an environmental temperature and oxidizing zirconium constituting the solute, the environmental temperature is changed. Thus, the gradient function film is formed which is configured by laminating a plurality of function layers of different electric characteristics on the substrate.;COPYRIGHT: (C)2014,JPO&INPIT