BYPASS UNIT, A BASE FOR A FLOW METER, A BASE FOR A FLOW CONTROLLER, A FLOW METER, AND A FLOW CONTROLLER

摘要

Several types of flow apparatus are disclosed including bypass parts, mass flow meters, and mass flow controllers are disclosed. A bypass unit includes a bypass part that is a plate-like member and a pair of external connection parts that is a pair of plate-like members laminated on two principal surfaces of the bypass part, respectively. The bypass part includes one first member or a laminated object of the first members. The first member is a sheet-like member in which a first inlet hole, a first outlet hole, and a groove, which makes these holes communicate with each other are formed. A second inlet hole and a second outlet hole are formed in the external connection part. The first inlet hole and the second inlet hole are configured to airtightly communicate, and the first outlet hole and the second outlet hole are configured to airtightly communicate with each other.