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BEAM DUMP APPARATUS, LASER APPARATUS EQUIPPED WITH THE BEAM DUMP APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
BEAM DUMP APPARATUS, LASER APPARATUS EQUIPPED WITH THE BEAM DUMP APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
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机译:光束转盘设备,装有光束转盘设备的激光设备和极紫外光产生设备
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摘要
A beam dump apparatus may include: an attenuator module; a beam dump module; and a control unit. The attenuator module includes: a first beam splitter provided inclined with respect to the optical axis of a laser beam at a first angle; a second beam splitter provided inclined with respect to the optical axis at a second angle; a first beam dumper provided such that the laser beam from the first beam splitter enters thereinto; a second beam dumper provided such that the laser beam from the second beam splitter enters thereinto; and a first stage that causes the beam splitters to advance into and retreat from the optical path. The beam dump module includes: a mirror; a third beam dumper provided such that the laser beam from the mirror enters thereinto; and a second stage that causes the mirror to advance into and retreat from the optical path.
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