Health Assessment Method and Health Assessment Device for Workpiece Processing Apparatus

摘要

A health assessment method and a health assessment device of a workpiece processing apparatus are disclosed. The health assessment method includes the following steps. Acquire a first sensing data related to the workpiece processing apparatus at an operation stage of the workpiece processing apparatus. Set the first sensing data as a substitution of a first transform model to acquire a virtual workpiece quality. Set the virtual workpiece quality as a substitution of a second transform model to acquire a first virtual apparatus health index.