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MULTIPLE THRESHOLD VOLTAGES USING FIN PITCH AND PROFILE
MULTIPLE THRESHOLD VOLTAGES USING FIN PITCH AND PROFILE
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机译:使用FIN PITCH和PROFILE的多个阈值电压
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摘要
A multi-Vt FinFET includes a semiconductor substrate, multiple first fins coupled to the semiconductor substrate having a first fin pitch, and multiple second fins coupled to the semiconductor substrate having a second fin pitch larger than the first fin pitch. The semiconductor structure further includes transistor(s) on the multiple first fins, and transistor(s) on the multiple second fins, a threshold voltage of the transistor(s) on the multiple second fins being higher than that of the transistor(s) on the multiple first fins.
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