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Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance
Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance
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机译:具有断裂韧性和耐卤素等离子体性的块状烧结固溶陶瓷
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摘要
A bulk, sintered solid solution-comprising ceramic article useful in semiconductor processing, which is resistant to erosion by halogen-containing plasmas and provides advantageous mechanical properties. The solid solution-comprising ceramic article is formed from a combination of yttrium oxide and zirconium oxide. The bulk, sintered solid solution-comprising article is formed from zirconium oxide at a molar concentration ranging from about 96 mole % to about 94 mole %, and yttrium oxide at a molar concentration ranging from about 4 mole % to about 6 mole %.
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