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Polishing apparatus having end point detecting apparatus detecting polishing end point on basis of current and sliding friction
Polishing apparatus having end point detecting apparatus detecting polishing end point on basis of current and sliding friction
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机译:具有终点检测装置的抛光装置,该终点检测装置基于电流和滑动摩擦来检测抛光终点
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摘要
A polishing apparatus includes: a polishing table 12 for holding a polishing pad; a first electric motor 14 that rotationally drives the polishing table 12; a first rotary joint 40 that has a rotating body 41 that is rotationally driven by the first electric motor 14, a housing 42 provided around the rotating body 41, and a seal portion 44 that seals between the rotating body 41 and the housing 42; a second current sensor 31 that detects a current which is correlated with driving load of the first electric motor 14; a friction detecting unit 50 that detects sliding friction in the seal portion 44 of the first rotary joint 40; and an end point detecting apparatus 60 that detects a polishing end point of the polishing target on the basis of the current and the sliding friction.
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