首页> 外国专利> METHOD FOR EXTRACTING NON-PERIODICAL PATTERNS MASKED BY PERIODICAL PATTERNS, AND DEVICE IMPLEMENTING THE METHOD

METHOD FOR EXTRACTING NON-PERIODICAL PATTERNS MASKED BY PERIODICAL PATTERNS, AND DEVICE IMPLEMENTING THE METHOD

机译:提取周期性图案掩盖的非周期性图案的方法及实现该方法的装置

摘要

A method is provided for extracting information of interest from a measurement signal having a periodic interference pattern, which includes steps (i) of generating a filtering function representing the frequency components of the interference pattern, by implementing an analysis of an amplitude spectrum of the measurement signal based on morphological criteria, (ii) of applying the filtering function to the measurement signal so as to generate an interference signal constituted essentially by the interference pattern, and (iii) of calculating a filtered signal by carrying out a difference between the measurement signal and the interference signal.;The invention also relates to a device implementing the method.
机译:提供了一种用于从具有周期性干扰图案的测量信号中提取感兴趣的信息的方法,该方法包括步骤(i):通过对测量的幅度谱进行分析来生成表示干扰图案的频率分量的滤波函数。基于形态学标准的信号,(ii)将滤波功能应用于测量信号,以生成基本上由干涉图样构成的干涉信号,以及(iii)通过对测量信号之间的差进行计算来计算滤波信号本发明还涉及实现该方法的设备。

著录项

  • 公开/公告号US2017161887A1

    专利类型

  • 公开/公告日2017-06-08

    原文格式PDF

  • 申请/专利权人 FOGALE NANOTECH;

    申请/专利号US201515325684

  • 发明设计人 BENOIT THOUY;

    申请日2015-07-29

  • 分类号G06T7;H01L23/544;G06T5;G06T5/10;G06K9;

  • 国家 US

  • 入库时间 2022-08-21 13:47:13

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