首页> 外国专利> Designed asperity contactors, including nanospikes, for semiconductor test using a package, and associated systems and methods

Designed asperity contactors, including nanospikes, for semiconductor test using a package, and associated systems and methods

机译:设计的粗糙接触器,包括纳米钉,用于使用封装进行半导体测试,以及相关的系统和方法

摘要

Nanospike contactors suitable for semiconductor device test, and associated systems and methods are disclosed. A representative apparatus includes a package having a wafer side positioned to face toward a device under test and an inquiry side facing away from the wafer side. A plurality of wafer side sites are carried at the wafer side of the package. The nanospikes can be attached to nanospike sites on a wafer side of the package. Because of their small size, multiple nanospikes make contact with a single pad/solderball on the semiconductor device. In some embodiments, after detecting that the device under test passes the test, the device under the test can be packaged to create a known good die in a package.
机译:公开了适用于半导体器件测试的纳米钉接触器以及相关的系统和方法。一种代表性的设备包括封装,该封装具有被定位成面向被测器件的晶片侧和背离晶片侧的询问侧。在封装的晶片侧载有多个晶片侧部位。可以将纳米钉附着到封装的晶片侧的纳米钉部位。由于尺寸小,多个纳米钉与半导体器件上的单个焊盘/焊球接触。在一些实施例中,在检测到被测器件通过测试之后,可以将被测器件封装以在封装中产生已知的良好裸片。

著录项

  • 公开/公告号US9733272B2

    专利类型

  • 公开/公告日2017-08-15

    原文格式PDF

  • 申请/专利权人 TRANSLARITY INC.;

    申请/专利号US201615286035

  • 发明设计人 DOUGLAS A. PRESTON;MORGAN T. JOHNSON;

    申请日2016-10-05

  • 分类号G01R31/28;G01R1/067;G01R1/073;H01L21/66;G01R3/00;

  • 国家 US

  • 入库时间 2022-08-21 13:46:59

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