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Pressure sensor device with high sensitivity and high accuracy
Pressure sensor device with high sensitivity and high accuracy
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机译:具有高灵敏度和高精度的压力传感器装置
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摘要
The voltages output from a low-pressure MEMS sensor are increased by increasing the sensitivity of the sensor. Sensitivity is increased by thinning the diaphragm of the low pressure sensor device with corner trench. Nonlinearity increased by thinning the diaphragm is reduced by simultaneously creating a cross stiffener to the bottom side of the diaphragm. A rim, anchors, and a stiffener pad can also be added to further stiffen the thinner diaphragm and further reduce pressure nonlinearity.
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