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ULTRAVIOLET PHOTODETECTORS AND METHODS OF MAKING ULTRAVIOLET PHOTODETECTORS
ULTRAVIOLET PHOTODETECTORS AND METHODS OF MAKING ULTRAVIOLET PHOTODETECTORS
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机译:紫外光电检测器和制造紫外光电检测器的方法
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摘要
A method of making an ultraviolet sensor includes applying a metal-containing solution to a substrate using a spin coating technique to form a metal-containing coat. The metal-containing coat is baked and pyrolyzed to form a metal-containing oxide film on the substrate. The metal-containing oxide film has a cubic crystalline structure suitable for ultraviolet photodetectors in flame detection applications.
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