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Flat covered leadless pressure sensor assemblies suitable for operation in extreme environments
Flat covered leadless pressure sensor assemblies suitable for operation in extreme environments
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机译:平盖无铅压力传感器组件,适合在极端环境下运行
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摘要
This disclosure provides example methods, devices and systems associated with flat covered leadless pressure sensor assemblies suitable for operation in extreme environments. In one embodiment, a system may comprise a semiconductor substrate having a first side and a second side; a diaphragm disposed on the first side of the semiconductor substrate; a first cover coupled to the first side of the semiconductor substrate such that it overlays at least the diaphragm, wherein a pressure applied at the first cover is transferred to the diaphragm; and a sensing element disposed on the second side of the semiconductor substrate, wherein the sensing element is used to measure the pressure.
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