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APPARATUS FOR REAL-TIME NON-CONTACT NON-DESTRUCTIVE THICKNESS MEASUREMENT USING TERAHERTZ WAVE
APPARATUS FOR REAL-TIME NON-CONTACT NON-DESTRUCTIVE THICKNESS MEASUREMENT USING TERAHERTZ WAVE
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机译:使用TERAHERTZ波的实时非接触式非破坏性厚度测量装置
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摘要
Provided is an apparatus for real-time non-contact non-destructive thickness measurement using a terahertz wave, and more particularly, an apparatus for real-time non-contact non-destructive thickness measurement using a terahertz wave, which is capable of measuring a thickness of a sample by irradiating a terahertz continuous wave, which is generated from a wavelength-fixed laser and a wavelength-swept laser and of which the frequency is changed at a high speed, to the sample and measuring the terahertz wave transmitting or reflected from the sample.
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