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Deformable mirror for efficient correction of large aberrations

机译:可变形镜面,可有效校正大像差

摘要

The present invention relates to a deformable mirror, specifically a gimbaled deformable mirror for use with wavefront sensors, which mirror separates the tilt correction from the higher order modes (e.g. defocus, spherical, astigmatism, and coma at higher order aberrations, up to the limits of a particular mirror design) in order to use all of the available mirror deformation stroke for correcting the higher order modes. The separation is done by placing the deformable mirror in a gimbaled structure, so that the deformable mirror can be tilted in two independent, orthogonal axes.
机译:本发明涉及一种可变形反射镜,特别是一种与波前传感器一起使用的万向节形可变形反射镜,该反射镜将倾斜校正与高阶像差(例如散焦,球面,像散和彗形像差)在高阶像差下达到极限。为了使用所有可用的镜面变形笔划来校正高阶模态,请使用特定的镜面设计。通过将可变形镜放置在万向架中来完成分离,以便可变形镜可以在两个独立的正交轴上倾斜。

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