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Vanadium-containing film forming compositions and vapor deposition of vanadium-containing films
Vanadium-containing film forming compositions and vapor deposition of vanadium-containing films
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机译:含钒成膜组合物和含钒膜的气相沉积
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摘要
Vanadium-containing film forming compositions are disclosed, along with methods of synthesizing the same, and methods of forming Vanadium-containing films on one or more substrates via vapor deposition processes using the Vanadium-containing film forming composition.
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