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Arc evaporated Me11-aMe2aZI/Mo1-b-cSicBbZII multilayer coatings

机译:电弧蒸发的Me1 1-a Me2 a ZI / Mo 1-bc Si c B b < / Sub> ZII多层涂料

摘要

A coating including a multilayer film, which includes a multi-layered structure including layers of the type I and layers of the type II. The layers of the type I are metal nitride with a chemical composition given by the formula Me11-aMe2aZI and the layers of the type II are a Mo-comprising material with chemical composition given by the formula Mo1-b-cSicBbZII or Mo1-b-cSicBb. Also described is a method for depositing the above mentioned coating.
机译:一种包括多层膜的涂层,其包括多层结构,所述多层结构包括I型层和II型层。类型I的层是化学组成为Me1 1-a Me2 a ZI的金属氮化物,类型II的层包含Mo化学组成由分子式Mo 1-bc Si c B b ZII或Mo 1-bc 给出的材料Si c B b 。还描述了沉积上述涂层的方法。

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