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Method and apparatus for providing an anisotropic and mono-energetic neutral beam by non-ambipolar electron plasma
Method and apparatus for providing an anisotropic and mono-energetic neutral beam by non-ambipolar electron plasma
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机译:通过非双极电子等离子体提供各向异性和单能中性束的方法和装置
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摘要
Embodiments include a chemical processing apparatus and method of using the chemical processing apparatus to treat a substrate with a mono-energetic space-charge neutralized neutral beam-activated chemical process which is comprised of a substantially anisotropic beam of neutral particles. The chemical processing apparatus comprises a first plasma chamber for forming a first plasma at a first plasma potential, and a second plasma chamber for forming a second plasma at a second plasma potential greater than the first plasma potential, wherein the second plasma is formed using electron flux from the first plasma. Further, the chemical processing apparatus comprises an ungrounded dielectric (insulator) neutralizer grid configured to expose a substrate in the second plasma chamber to the substantially anisotropic beam of neutral particles traveling from the neutralizer grid.
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