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Magnetic field probe, magnetic field measurement system and magnetic field measurement method
Magnetic field probe, magnetic field measurement system and magnetic field measurement method
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机译:磁场探头,磁场测量系统和磁场测量方法
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摘要
A magnetic field probe, a magnetic field measurement system, and a magnetic field measurement method are provided. The magnetic field probe includes a probe head. The probe head includes a first and second inner metal layer. The first inner metal layer includes a first sensing part and a first connecting part coupled thereto. The first sensing part is configured for detecting a magnetic field signal of a device under test to form a first magnetic field distribution signal. The second inner metal layer includes a second sensing part and a second connecting part coupled thereto. The second sensing part is configured for detecting the magnetic field signal of the device under test to form a second magnetic field distribution signal. A distance between the first sensing part and the device under test is smaller than that between the second sensing part and the device under test.
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