Near magnetic field probe and the near magnetic field probe unit and near magnetic field probe array and magnetic field measurement system

摘要

PROBLEM TO BE SOLVED: To reduce measuring errors by preventing, using simple constitution, the interlinkage of a magnetic field from a measured part to the extension wire part of a near magnetic field probe which is brought close to the subject of measurement to detect a magnetic field. ;SOLUTION: In a near magnetic field probe 1, which has on a substrate 2a coil 3 comprising one turn of winding made of a conductive thin film or a plurality of turns of windings with insulating layers between them, an extension wire 4 from the coil 3, and a pad 5 to which the extension wire 4 is connected, the extension wire 4 is provided with a conductive thin film 7 for use as a shield, with an insulating layer 6 between them. Thus, by providing the shield layer made of the conductive thin film 7 on the extension wire 4, errors caused by the interlinkage of magnetic flux to the extension wire are reduced to enable measurements of higher accuracy.;COPYRIGHT: (C)1998,JPO