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Motion and focus blur removal from pattern images
Motion and focus blur removal from pattern images
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机译:从图案图像中去除运动和焦点模糊
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摘要
A moving wafer imaging system processes wafer images to remove motion and focus blur by performing a blind deconvolution to determine an approximate point spread function. The approximate point spread function, estimated image noise and a Gaussian point spread function are used to compute a weighted point spread function. The weighted point spread function is used to filter out motion focus blur. Noise is then removed with a low-pass filter.
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