MOTION AND FOCUS BLUR REMOVAL FROM PATTERN IMAGES

摘要

The moving wafer imaging system processes wafer images to remove motion and focus blur by performing blind deconvolution to determine an approximate point distribution function. The approximate point distribution function, estimated image noise, and Gaussian point distribution function are used to calculate the weighted point distribution function. The weighted point distribution function is used to filter out the motion focus blur. The noise is then removed with a low pass filter.