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Method for producing a flexible piezoelectric sensor
Method for producing a flexible piezoelectric sensor
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机译:柔性压电传感器的制造方法
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摘要
A method for producing a piezoelectric sensor, includes the following steps: producing, on a rigid support (10), a stack of sensor layers (2, 4, 5, 12), the sensor layers including a layer of piezoelectric material (5) included between a first electrode (6, 7) and a second electrode (8, 9), the first electrode not being in contact with the second electrode, then, while the sensor layers (2, 4, 5, 12) are still held by the rigid support (10), covering the sensor layers with a polymer layer (11), then removing the stack of sensor layers from the rigid support (10), such that the sensor layers covered by the polymer layer (11) are no longer carried by the rigid support (10).
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