Temperature control apparatus and test system using main flow path and sub flow path

摘要

Increase in number of valves complicates the configuration and control. A temperature control apparatus for controlling a temperature of a device, includes; a heat exchange section exchanging heat with the device; a main flow path causing a fluid to flow; a sub flow path causing, to flow, a fluid having a temperature different from a temperature of the fluid flowing through the main flow path; a mixture flow path merging the fluids from the main flow path and the sub flow path and causing the merged fluids to flow to the heat exchange section; and a flow rate adjusting section adjusting an amount of a fluid flowing from the sub flow path to the mixture flow path, in relation to the fluid flowing through the main flow path.