A METHOD TO DEPOSIT COPPER INDIUM GALLIUM DISELENIDE (CIGS)/ COPPER ZINC TIN SULPHIDE (CZTS) FOR SUPERSTRATE CIGS / CZTS SOLAR CELLS

摘要

A method for depositing thin films over a substrate having pre-deposited film of temperature sensitive material comprising: heating the substrate having a thin film of temperature sensitive material in high vacuum chamber on a rotating heating plate to a temperature range of 25-250 ºC, creating the plasma by releasing 2.5 m Torr to 8 m Torr of working gas and applying radio frequency or direct current, depositing the plasma and then it was cert off after 2 to 20 minutes raising the temperatures of the said coated substrate to 300 to 550 ºC, creating the plasma by releasing 2-5 Torr to 8m Torr of working gas and apply RF or DC power, depositing the plasma and cutting off the plasma after 30-120 minutes, subjecting the coated substrate to the step of cooling, the vacuum was gradually released and substrate was taken out.