METHODS OF SPUTTERING CADMIUM SULFIDE LAYERS FOR USE IN CADMIUM TELLURIDE BASED THIN FILM PHOTOVOLTAIC DEVICES

摘要

METHODS ARE GENERALLY PROVIDED OF SPUTTERING A CADMIUM SULFIDE LAYER (18) ON A SUBSTRATE (12). THE CADMIUM SULFIDE LAYER (18) CAN BE SPUTTERED ON A SUBSTRATE (12)FROM A TARGET (64) IN A SPUTTERING ATMOSPHERE, WHEREIN THE TARGET (64) COMPRISES ABOUT 75% TO ABOUT 100% BY WEIGHT CADMIUM, AND WHEREIN THE SPUTTERING ATMOSPHERE COMPRISES A SULFUR-CONTAINING SOURCE GAS. THE CADMIUM SULFIDE LAYER (18) CAN BE USED IN METHODS OF FORMING CADMIUM TELLURIDE THIN FILM PHOTOVOLTAIC DEVICES (10).