DEFORMABLE MIRROR WITH FORCE ACTUATORS AND DISTRIBUTED STIFFNESS

摘要

The invention relates to a deformable mirror (1) thatcomprises a deformable membrane (2) with an outer reflectingsurface (3) and an opposite surface (4), a rigid bearing plate(7) and at least one force actuator (5, 6). Each actuator (5, 6)includes at least two elements (5 6) capable of remotelyinteracting with each other in order to generate a force in adirection substantially perpendicular to the surface of theinitially non-deformed membrane (2) and capable of movementrelative to each other along the direction of the force thusgenerated in order to create a local deformation of the membrane(2). One of the two elements (5, 6) is integrated in the bearingplate (7) while the other is coupled to the membrane (2). One ofsaid elements (5, 6) is capable of controlling the intensity ofthe force thus generated. According to the invention, the mirror(1) further includes a reference means (7, 8) coupled to themembrane (2) by at least one rigid connection means (10) and atleast one flexible connection means (11). Each rigid connectionmeans (10) is connected to the membrane (2) and each flexibleconnection means (11) is at least partially connected to thereference means (7, 8).