SIMULATION OF LITHOGRAPHY USING MULTIPLE-SAMPLING OF ANGULAR DISTRIBUTION OF SOURCE RADIATION

摘要

Disclosed herein is a computer-implemented method including: determining a first partial image formed from a first radiation portion propagating along a first group of one or more directions, by a lithographic projection apparatus; determining a second partial image formed from a second radiation portion propagating along a second group of one or more directions, by the lithographic projection apparatus; determining an image by incoherently adding the first partial image and the second partial image; wherein the first group of one or more directions and the second group of one or more directions are different.