METHOD FOR OPERATING A XENON EXCIMER LAMP AND LAMP SYSTEM COMPRISING AN EXCIMER LAMP

摘要

Known methods for operating a xenon excimer lamp comprising an outlet window made of quartz glass, comprise the method steps: (a) operating of the excimer lamp at a radiation intensity of more than 80 mW/cm² and (b) controlling the temperature of the excimer lamp at an operating temperature. In order a method based thereon for operating a xenon excimer lamp that has a radiation intensity above 80 mW/cm² which enables a high service life of the xenon excimer lamp, according to the invention it is proposed that the temperature of the excimer lamp be controlled at an operating temperature in the range from 181 °C to 199 °C.