A method for operating a xenon - excimer - lamp and the lamp system with an excimer - lamp

摘要

Known method for operating a xenon - excimer - lamp with an exit window made of quartz glass, comprise the steps of:(a) operation of the excimer - lamp with an irradiation intensity of more than 80 mw / cm² and(b) controlling the temperature of the excimer - lamp to an operating temperature. In order to a method for operating a xenon - excimer - lamp with an irradiation intensity of above 80 mw / cm² the sensor, a high can of the xenon - excimer - lamp makes it possible, it is proposed according to the invention that the excimer - lamp to an operating temperature in the range of 181°C. to 199°C. is tempered.