DUAL-AXIS ULTRA-ROBUST ROTATION RATE SENSOR FOR AUTOMOTIVE APPLICATIONS

摘要

The proposal relates to a rotation rate sensor having a substrate having a main extent plane and having at least one first rotation rate sensor structure for detecting a first rotation rate of the rotation rate sensor about an axis substantially parallel to a first axis running parallel to the main extent plane and having at least one second rotation rate sensor structure detecting a second rotation rate of the rotation rate sensor about an axis substantially parallel to a second axis running perpendicular to the main extent plane, wherein the rotation rate sensor comprises a drive device – both for deflecting at least one first structure, which is mobile with respect to the substrate, of the first rotation rate sensor structure and at least one second structure, which is mobile with respect to the substrate and with respect to the first structure, of the first rotation rate sensor structure – and for deflecting at least one third structure, which is mobile with respect to the substrate, the second rotation rate sensor structure and at least one fourth structure, which is mobile with respect to the substrate and with respect to the third structure, of the second rotation rate sensor structure, such that the first, second, third and fourth structures are stimulable to produce a mechanically coupled oscillation.