ACOUSTIC TRANSDUCER ARRANGEMENT HAVING A STRUCTURED METAL LAYER AND METHOD FOR PRODUCING AN ACOUSTIC TRANSDUCER ARRANGEMENT HAVING A STRUCTURED METAL LAYER

摘要

An acoustic transducer arrangement (100) comprising a perforated plate carrier (101) which has horizontally spaced first recesses (102) and horizontally spaced second recesses, in each case a first recess (102) and a second recess (103) being arranged adjacently above each other, wherein a horizontal extent of the second recess (103) is larger than a horizontal extent of the first recess (102) so that support surfaces (104) form within the perforated plate carrier (101); a plurality of piezoelectric elements (105); and a top layer (108), characterized in that each second recess (103) has a piezoelectric element (105) and the piezoelectric elements (105) are partially situated on the support surfaces (104), each piezoelectric element (105) having a horizontal extent that is larger than the horizontal extent of the first recess (102) and smaller than the horizontal extent of the second recess (103) so that cavities form in the horizontal direction between the perforated plate carrier (101) and the piezoelectric elements (105) and the top layer (108) is situated on the perforated plate carrier (101) and the piezoelectric elements (105), wherein the top layer (108) has a first structured metal layer (109) which is situated above the piezoelectric elements (105) and functions as a membrane.