TRIBOELETRICITY BASED PNEUMATIC SENSOR, AIRFLOW PROCESSING APPARATUS, AND INTELLIGENT PNEUMATIC SENSOR SYSTEM

摘要

A triboeletricity based pneumatic sensor (100), comprising: a housing (110), wherein an accommodating cavity (111) is formed in the housing (110), an air inlet (112) is formed on the side wall thereof, an air outlet (113) is formed on the bottom wall thereof, and the air inlet (112) and the air outlet (113) are in communication with the accommodating cavity (111) to form an airflow path; a vibration film component (120) with both ends being fixedly provided in the accommodating cavity (111) in the housing (110), wherein vibration gaps are respectively formed between the vibration film component (120) and an electrode component (140) and between the vibration film component (120) and the bottom wall of the housing (110), and the vibration film component (120) is driven by airflow in the accommodating cavity (111) to reciprocately vibrate relative to the electrode component (140) and the bottom wall of the housing (110); and the electrode component (140) that serves as a signal output end of the pneumatic sensor (100) and that is provided opposite to the vibration film component (120), wherein the reciprocately vibrating vibration film component (120) rubs against the electrode component (140) and/or the bottom wall of the housing (110), to generate a sensing electric signal that is outputted by the electrode component (140).