DYNAMIC-MAGNETIC STEEL MAGNETIC LEVITATION DOUBLE-WORKPIECE-STAGE VECTOR ARC SWITCHING METHOD AND APPARATUS BASED ON PLANAR GRATING MEASUREMENT

摘要

A dynamic-magnetic steel magnetic levitation double-workpiece-stage vector arc switching method and apparatus based on planar grating measurement, falling within the semiconductor manufacturing equipment technology. The apparatus comprises a support frame (1), a balance mass block (2), wireless charging and wireless communication magnetic levitation workpiece stages (4a, 4b), a workpiece stages measurement apparatus and a workpiece stage driving apparatus, wherein the two workpiece stages work between a measurement site (11) and an exposure site (12); planar gratings (5a, 5b) are used to measure the positions of the workpiece stages; a passive compensation structure composed of a planar leaf spring (13) and an electromagnetic damper (14) is used to perform motion compensation on the balance mass block (2); the workpiece stages are driven using a magnetic levitation planar electrical motor; and during a double-workpiece-stage switching process, the planar electrical motor is used to drive the two workpiece stages so as to achieve single-beat arc quick switching. By means of the method and apparatus, the problem that an existing stage switching scheme has many beats, a long track, many start-stop links, a long time for stabilization and a large cable disturbance is solved, thereby reducing the stage switching links, shortening the stage switching time, and improving the productivity of a lithography machine.