[Problem] To create an ion implanter and a mass spectrometer that are compact in size and inexpensive, so as to be usable by anyone. [Solution] The present invention is an ion implanter which is formed from a plurality of substrates including a main substrate, a top substrate adhered to the top surface of the main substrate, and a bottom substrate adhered to the bottom surface of the main substrate, and in which ions are accelerated through a cavity (penetrating chamber) penetrating from the top surface of the main substrate to the bottom surface of the main substrate. The ion implanter is characterized by having a plurality of penetrating chambers, and in that the plurality of chambers include: an ionizing chamber for generating ions; an ion extracting/accelerating chamber for extracting the ions generated in the ionizing chamber and accelerating the ions to a prescribed speed; an ion mass separating chamber for selecting and separating the ions accelerated in the ion extracting/accelerating chamber as ions having the desired mass and charge ratio; an ion accelerating chamber for accelerating the ions selected and separated from the ion mass separating chamber to a prescribed speed; and an ion scanning/emitting chamber for scanning the ions accelerated by the ion accelerating chamber and emitting the ions to the exterior of the ion implanter.
展开▼
