EQUIPMENT FRONT END MODULE HAVING LOW DEW POINT AND LOW TEMPERATURE DEHUMIDIFICATION FUNCTION

摘要

An equipment front end module (EFEM) having a low dew point and low temperature dehumidification function according to the present invention comprises: a first case having a substrate transfer chamber provided therein, a fan filter unit having a fan filter unit provided on an upper portion of the substrate transfer chamber, and a discharge port provided in a lower portion of a lateral surface thereof to allow air of the substrate transfer chamber to be discharged; a second case placed a predetermined distance apart from the first case, installed to surround the first case, and having an air circulating passage formed between the first and second cases to allow air discharged from the substrate transfer chamber through the discharge port to move and circulate; a low dew point dehumidification device having a compressor disposed on an upper portion of the first case to compress a coolant, a condenser condensing the compressed coolant, and a vaporizer vaporizing the condensed coolant to absorb heat of ambient air, and collecting and removing pollutants containing moisture in the air; and a heating source installed on an upper portion of the fan filter unit to heat air flowing to the fan filter unit. The vaporizer is disposed on a location corresponding to an upper portion of the air circulating passage on a moving path of the air to collect and remove water in the air pass through the air circulating passage, and air from which moisture is removed through the vaporizer flows into the substrate transfer chamber again via the fan filter unit to circulate.;COPYRIGHT KIPO 2016