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MANUFACTURING METHOD OF HYDROGEN SULFIDE SENSING LAYER, HYDROGEN SULFIDE SENSOR, AND DETECTION METHOD OF HYDROGEN SULFIDE USING SAME
MANUFACTURING METHOD OF HYDROGEN SULFIDE SENSING LAYER, HYDROGEN SULFIDE SENSOR, AND DETECTION METHOD OF HYDROGEN SULFIDE USING SAME
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机译：硫化氢传感层的制造方法，硫化氢传感器以及使用相同方法检测硫化氢的方法
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摘要
The present invention relates to a manufacturing method of a hydrogen sulfide sensing layer, a hydrogen sulfide sensor, and a detection method of hydrogen sulfide using the same. The manufacturing method of a hydrogen sulfide sensing layer comprises a step of performing a sputtering process by using a copper target in the range of 300-700°C, in a state of a partial pressure rate of argon gas to oxygen gas greater than 95 : 5 and less than or equal to 97 : 3.;COPYRIGHT KIPO 2016
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